Vacuum Pump Inlet Traps for ALD Extract Particulates and Absorb Unreacted Precursors

26.09.2024
A full line of vacuum inlet traps for ALD (Atomic Layer Deposition) processes from research in small laboratories to large production systems has been introduced by Mass-Vac, Inc.
Vacuum Pump Inlet Traps for ALD Extract Particulates and Absorb Unreacted Precursors

VACUUM PUMP INLET TRAPS FOR ALD

MV Vacuum Inlet Traps for ALD processes can be easily customized by the user to remove all process byproducts from precursors such as TMA, TiCl, DeZ, and H2S including particulates and unreacted precursors. Available for both research and production applications, they come in sizes ranging from 4” to 16” dia. with port sizes from NW-25 to ISO-160 for protecting vacuum pumps and lines with flow rates from 25 to 2000 CFM.

Featuring interchangeable filter elements, MV Vacuum Inlet Traps for ALD processes are made of stainless steel and include the PosiTrap in 4” and 8” dia. sizes and the MultiTrap in 12” and 16”. Filters include stainless steel gauze for particles, activated charcoal for unreacted precursor adsorption, Sodasorb for acid neutralization, Sulfatreat for H2S neutralization, and Ammoiniasorb for NH3 and Amines.

More articles on this topic

Pfeiffer Vacuum+Fab Solutions Launches New Global Website

23.07.2025 -

The new website showcases a modern layout, improved navigation, and a range of features designed to help users easily access the products, services, and technical expertise they need. A new product finder enables visitors to explore the entire portfolio of both Busch Group brands – Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions.

Read more

Keeping Vacuum Pumps Cool During Summer Months

30.06.2025 -

As temperatures rise, the performance and durability of vacuum pumps can be significantly affected. Maintaining a cool environment for these devices is critical, as most are built to function effectively in ambient temperatures of up to 40°C. Overheating can lead to accelerated oil degradation, increased maintenance costs, and potential equipment failure, interrupting manufacturing and causing expensive repairs.

Read more

Pfeiffer Vacuum Becomes Pfeiffer Vacuum+Fab Solutions

16.10.2024 -

Pfeiffer Vacuum, a member of the global Busch Group, is proud to announce the introduction of its new name and refreshed logo, marking the evolution of the company into Pfeiffer Vacuum+Fab Solutions. This rebranding reflects the comprehensive portfolio of Pfeiffer as a one-stop supplier for both vacuum solutions and semiconductor fab solutions.

Read more