Vacuum Pump Inlet Traps for ALD Extract Particulates and Absorb Unreacted Precursors

For around 90 years, vacuum manufacturer Leybold has been offering the TRIVAC, a universally applicable rotary vane pump. The robust, oil-sealed vacuum pump combines many advantages and is used in industrial and research applications – for generating pressures in the rough and fine vacuum range and as a backing pump that can be combined with Roots, diffusion, turbomolecular, and cryogenic pumps. Leybold has now developed the TRIVAC L, a new model of the proven two-stage rotary vane vacuum pump with optimized air cooling.

The new website showcases a modern layout, improved navigation, and a range of features designed to help users easily access the products, services, and technical expertise they need. A new product finder enables visitors to explore the entire portfolio of both Busch Group brands – Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions.

As temperatures rise, the performance and durability of vacuum pumps can be significantly affected. Maintaining a cool environment for these devices is critical, as most are built to function effectively in ambient temperatures of up to 40°C. Overheating can lead to accelerated oil degradation, increased maintenance costs, and potential equipment failure, interrupting manufacturing and causing expensive repairs.

Innovative companies often have an interesting history. One tradition-conscious market leader is the German vacuum specialist Leybold. Founded by Ernst Leybold in Cologne in 1850, the company has achieved numerous pioneering milestones and product developments. Now, in 2025, the renowned manufacturer is celebrating its 175th anniversary.

With the TURBOVAC MAG 2807 iS and 3207 iS Maglev turbomolecular pumps, Leybold is launching two new, compact turbomolecular pumps in the pumping speed class of 3,000 l/s. Equipped with magnetic rotor bearings, these highly robust, low vibration pumps are ideal for clean, hydrocarbon free, high vacuum conditions.

With its compact design and intuitive usability, the TPG 202 Neo covers the range from 5E-5 to 1.2E3 hPa. The gauge is set to become the standard for reliable and efficient vacuum measurement tasks.