Drain port for vacuum pump inlet separator aids filtration of ALD processes

24.01.2023
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Mass-Vac, Inc., based in North Billerica, Massachusetts, USA, has released a new vacuum inlet separator inlet pipe drain connection option for semiconductor wafer fabs using ALD (Atomic Layer Deposition) technology.
Drain port for vacuum pump inlet separator aids filtration of ALD processes

Drain port for vacuum pump inlet separator aids filtration of ALD processes. (Image source: Mass-Vac, Inc.)

The MV MultiTrap vacuum inlet separator for ALD processes can now be equipped with a drain connection in the inlet pipe of the separator. An integrated needle valve allows ambient air to enter the inlet tube to initiate a reaction between the TMA and H2O precursors. The reaction produces a solid AL2O3 powder that is captured by a long, single-stage, stainless steel gauze filter. This process has proven extremely effective in removing large volumes of solid by-products.

The MV MultiTrap vacuum inlet separators with drain connection are made entirely of stainless steel 1.4301 (AISI 304) and have a high-capacity pre-stage. They are available in 304.8mm and 406.4mm (12" and 16") diameters and offer inlet and outlet connections with NW-50, ISO-80, ISO-100 and ISO-160 flanges. The drain port is available in NW-10 and NW-16 flange sizes.

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