Drain port for vacuum pump inlet separator aids filtration of ALD processes
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Drain port for vacuum pump inlet separator aids filtration of ALD processes. (Image source: Mass-Vac, Inc.)
The MV MultiTrap vacuum inlet separator for ALD processes can now be equipped with a drain connection in the inlet pipe of the separator. An integrated needle valve allows ambient air to enter the inlet tube to initiate a reaction between the TMA and H2O precursors. The reaction produces a solid AL2O3 powder that is captured by a long, single-stage, stainless steel gauze filter. This process has proven extremely effective in removing large volumes of solid by-products.
The MV MultiTrap vacuum inlet separators with drain connection are made entirely of stainless steel 1.4301 (AISI 304) and have a high-capacity pre-stage. They are available in 304.8mm and 406.4mm (12" and 16") diameters and offer inlet and outlet connections with NW-50, ISO-80, ISO-100 and ISO-160 flanges. The drain port is available in NW-10 and NW-16 flange sizes.
Source: Mass-Vac, Inc.