Drypump For 300 mm LPCVD Nitride Processes

21.08.2003

The iH1800HTX drypump, on display for the first time at SEMICON® West 2003 by BOC Edwards, further enhances the line of 300 mm process pumps currently offered by this leading semiconductor materials, equipment and services company.

The iH1800HTX pump is designed specifically for high throughput LPCVD nitride and other harsh 300 mm and flat panel display processes. Formation of condensing process byproducts is reduced inside the pump, providing longer service life and enables greater tool availability for wafer processing. Based on the proven iH series of drypumps, the iH1800HTX delivers 1800 m3/hr performance and operates at high temperatures to minimize byproduct build-up.

This is accomplished by optimizing the operating temperature of the pump, providing increased dilution capacity, and integrating an enlarged and heated pump exhaust line. The iH1800HTX is recommended by many process tool manufacturers for use on 300 mm LPCVD nitride platforms. BOC Edwards iH1800 series pumps have an outstanding performance record in other 300 mm environments such as stripping/ashing, diffusion, and other CVD processes.

More articles on this topic

Aseptic Process Diaphragm Pump for Field Trials on Homogenization of Demanding Emulsions

04.03.2024 -

At this year’s Anuga FoodTec, pump manufacturer LEWA will be presenting its newly developed LEWA homogenizer test system, that can be used to test the aseptic functioning of a homogenizer based on a hygienic hermetic process diaphragm pump. Thanks to a homogenizing valve that is also hygienic, it can be flexibly adjusted to the requirements of different emulsions.

Read more

Multi screw pump moves highly viscous heavy oil at low NPSHa

22.02.2024 -

At a tank farm in a Brazilian sea port, two centrifugal pumps were used for transferring heavy oil from storage tanks to road tankers or vessels until February 2020. This required the high viscosity of the medium to be reduced by means of diesel injection, costing the owner at least 2,000 US dollars each day. In addition, the centrifugal pumps regularly broke down due to cavitation damage. The owners decided to initially replace one of the two centrifugal pumps with a NOTOS multi screw pump from NETZSCH. Due to its very good suction capabilities, the selected four-screw 4NS is also suitable for highly viscous media with up to 200,000 cSt, achieving a flow rate of up to 3000 m³/h.

Read more

Desmi Introduces the Magnetically Driven Methanol Pump

20.02.2024 -

Safe and efficient DESMI mag-drive centrifugal pumps enable leakage-free methanol fuel systems for ships, reducing vessel carbon emissions and climate impact. With every year that passes, emission regulations tighten in the shipping industry. Shipowners who want to stay in business need to look for ways of reducing carbon emissions to comply with the targets defined in the IMO GHG Strategy and other regulations.

Read more