Pfeiffer Vacuum presents new turbopump for ion implantation applications HiPace 2800 IT
Pfeiffer Vacuum turbopumps HiPace 2800 IT. (Image source: Pfeiffer Vacuum)
The sophisticated rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures very good process adaption for ion implantation processes, were hydrogen is the most accumulating gas. With 2,600 l/s pumping speed for hydrogen the new HiPace 2800 IT is the best turbopump in its class.
The intelligent temperature management system prevents process condensation and deposition inside the pumping system. It allows setting the temperature individually to ideally support the process. The special coating of the rotor ensures robustness against all ion implantation process materials. Being based on a so-called hybrid bearing, a combination of ceramic ball bearings on the fore-vacuum side and permanently magnetic radial bearings on the high vacuum side, these HiPace turbopumps have a particularly robust bearing design. Together with the efficient coating, this forms the basis for the long life cycle and maximum up-time of the pumps.
Source: Pfeiffer Vacuum GmbH