Mykrolis to Distribute Levitronix ‘Bearingless’ Pump Technology

01.07.2003

Mykrolis Corporation, a leading supplier of components and subsystems to the semiconductor industry, has signed a distribution agreement with Zurich-based Levitronix, a manufacturer of specialized pump products for the semiconductor and medical markets.

The agreement allows Mykrolis to market Levitronix bearingless centrifugal pumps in select geographies, as well as to incorporate the pumps into Mykrolis subsystems for sale worldwide.

The Levitronix pump operates without bearings or seals, which lowers maintenance and enables higher precision, and easy control and integration. Compared to traditional pump systems, its innovative motor design offers better process control, very low vibration, no wear or particle generation, and a lower cost of ownership. Mykrolis will incorporate the pump into fluid delivery and filtration systems used for such applications as chemical mechanical planarization (CMP), wet etch and clean, and photochemical fluid delivery.

"Through this strategic relationship, Mykrolis will be able to add this innovative pump technology to the fluid delivery systems we are currently developing for a variety of wet applications in the semiconductor facility," said Gerry MacKay, vice president of worldwide sales and marketing for Mykrolis.

Reto Schoeb, chief executive officer of Levitronix Switzerland, stated, "We anticipate this agreement will expand our presence into the semiconductor and microelectronics industry by leveraging Mykrolis's strength in product development, along with its extensive global customer sales and support infrastructure."

About Mykrolis

Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit www.mykrolis.com.

About Levitronix

Based in Waltham, Massachusetts, with offices and production facilities in Zurich, Switzerland, Levitronix designs, manufactures and markets products incorporating magnetic levitation technology. These include a unique technology called the "Bearingless Motor" which combines an electric motor and a magnetic bearing in the same unit. Specialized products are available for the semiconductor, medical and biotechnology industries. For these markets, Levitronix designed a line of seal-less centrifugal pumps, based on bearingless motor technology. For more information, visit www.levitronix.com.

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